
Carbon Sputtering Target
Material Carbon Formula C Purity 99.99% Typical Substrates Si, Al2O3 sapphire, Glass Related Materials TiN, AlN, TiC, WC, SiC Introduction to Carbon Thin Films Carbon thin films offer a variety of research and commercial applications, ranging from energy storage and conversion, to advanced materials for applications such as electronics, optoelectronics, sensors, and biocompatible implants. Carbon thin films are also used in data storage devices and in various optical devices. Carbon thin films have unique optical, electrical, and mechanical properties, making them ideal for a variety of applications. Carbon thin films are typically deposited by vacuum deposition processes such as sputtering, evaporation, and pulsed laser deposition. Carbon can be sputtered with high surface area, good adhesion, low stress, and good electrical conductivity. What is the Typical Conductivity of Carbon thin films Thin Films The typical conductivity of carbon thin films is dependent on