E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM)

　This Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e.g., semiconductor fabrication) factory. This Document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this Standard: traffic management characteristics (queuing), parallel interface for carrier transfer (SEMI E84), transport and storage system controller architecture, and delivery of the trans