E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM)

 This Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e.g., semiconductor fabrication and flat panel display) factory. This Standard accomplishes this by defining an operational model for Stocker SEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, and data reports). Several topics require additional activity that are within the scope of this Standard: queuing, parallel interface for carrier transfer (SEMI E23), stocker controller architecture, and scheduling and transport of the transfer unit. The scope of this Standard is limited