TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork

img{max-width:100%} TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 51161-802-001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M-SSB020FN502 NSK Linear Stage Slide Part No: XY-HRS025ZRS202 Parts List Assembly Part No: 5087-403668-12, IRAM (LITHIUS IPL), X-AXIS 5080-192746-11: BASE,FORK IRAM XY-P5179 (Qty. 1) 5080-193009-11: PLATE(X),TOP XY-P5205 (Qty. 1) 5090-193008-11: COVER(X),TOP XY-P5204 (Qty. 1) 5080-193010-11: COVER(X),SIDE XY-P5206 (Qty. 2) 5080-192744-11: BELT(X),UPPER IRAM XY-P5178 (Qty. 1) 5080-193011-11: SPACER(X),BELT XY-P5207 (Qty. 1) 5080-193007-11: BASE(X),IRAM XY-P5263 (Qty. 1) 5080-193013-11: BRACKET(X),FRONT XY-P5209 (Qty. 1) 5080-192467-11: PHOTOSENSOR,IRAM X #01 XY-L3477 (Qty. 1) 5080-192468-11: PHOTOSENSOR,IRAM X #02..XY-L3476 (Qty. 1) 5080-193014-11: COVER(X),UNDER XY-P5210 (Qty. 1) 5080-192755-11: PCB,I/F IRAM X #01 XY-E3670 (Qty. 1) 5080-193012-11: BRACKET(X),IRAM XY-P5208 (Qty. 1) 5080-192466-11: PHOTOSENSOR,IRAM #01 XY-L3478 (Qty. 1) 5080-192751-12: X-AXIS,UNDER IRAM XY-HS0026-701-001 (Qty. 1) 5080-193015-11: COVER(X),BELT XY-P5211 (Qty. 1) 5080-193018-11: CASE(X),UNDER XY-P5213 (Qty. 1) 5080-192508-11: BELT(X),UNDER IRAM XY-P5002 (Qty. 1) 5080-192470-11: MOTOR,SERVO IRAM X #01 XY-M3678 (Qty. 1) 5080-193019-11: SCREW(X),IRAM XY-P5214 (Qty. 1) 5080-193017-11: BLOCK(X),SEAL XY-P5212 (Qty. 1) 5080-193020-11: COVER(X),SEAL XY-P5215 (Qty. 2) 5080-193016-11: BELT(X),SEAL XY-P5216 (Qty. 1) 5080-192749-12: X-AXIS,IRAM..XY-HS0051-804-001 (Qty. 1) 5080-192750-12: X-AXIS,UPPER IRAM..XY-HS0026-802 (Qty. 1) Assembly Part No: 5087-403669-12, IRAM (LITHIUS IPL), T-AXIS 5080-193023-11: BLOCK(T),UPPER XY-P5218 (Qty. 1) 5080-192472-12: MOTOR,SERVO IRAM T #01 M-SSB020FN502 (Qty. 1) 5080-193022-11: BLOCK(T),IRAM XY-P5217 (Qty. 1) 5080-193021-12: BRACKET(T),IRAM M-FZ276 (Qty. 1) 5080-192466-11: PHOTOSENSOR,IRAM #01 XY-L3478 (Qty. 1) 5080-192489-11: CABLE ASSY,IRAM MTR-T #01 M-C006SB51 (Qty. 1) Assembly Part No: 5085-405391-12, FORK ASSY,IRAM 5010-303277-11 FORK(300),ARM (Qty. 1) 5004-400010-11 BLOCK(1),FRONT IRAM (509510015212) (Qty. 1) 5004-400011-11 BLOCK(2),FRONT IRAM (509510015212) (Qty. 1) 5010-406677-11 BLOCK,IRA CENTER (Qty. 1) This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 38"x25"x32" @ 135 lbs.; Requires Freight Shipping Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Items are sold with a 90-Day Satisfaction Guarantee Lister 0 RL Listed with ExportYourStore.com