TEL Tokyo Electron 300mm Wafer PRA Process Block Robotics Arm Lithius Working

img{max-width:100%} TEL Tokyo Electron 300mm Wafer PRA Process Block Robotics Arm Lithius Working Model No: PRA X AXIS ASSY Process Block Robotics Arm Removed from a TEL Tokyo Electron 300mm Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5085-407036-19 X AXIS ASSY 5010-101146-12 BASE,(X)UPPER 1 5010-101147-13 BASE(X),LOWER 1 5004-400017-12 ARM(X1-1) (509510045511 1 5010-305344-11 SUPPORT(X1-1) 1 5004-400018-11 ARM(X2-1) (509510045511 1 5010-306532-11 ARM(X2-2) 1 5010-305345-12 SUPPORT(X2-1) 1 5004-400019-11 ARM(X3-1) (509510045511 1 5010-306533-11 ARM(X3-2) 1 5010-305346-11 SUPPORT(X3-1) 1 5004-400015-11 CLAMP,BELT (509510045411 6 5010-401565-12 PLATE 5 5010-404925-11 STOPPER(X-1) 3 5010-404926-11 STOPPER(X-2) 6 5010-305873-11 SUPPORT(X-2) 1 5010-305987-11 SUPPORT(X2-2) 1 5010-306512-12 STAY,SUPPORT 1 5010-405028-11 COVER,CABLE 1 5010-404472-11 COVER,SENSOR 1 5010-405427-11 PILLER(1) 2 5010-405428-11 PILLER(2) 4 5010-307086-12 PLATE(1),SIDE 1 5010-306535-12 PLATE(2),SIDE 1 5010-306536-12 PLATE(3),SIDE 1 5010-404927-11 BLOCK,AJUST 2 5010-405430-12 SHUTTER(X) 3 5010-405429-12 BRACKET,SUPPORT 1 5010-408761-11 SHUTTER(TH) 1 5010-402407-11 STOPPER(TH) 1 5010-405431-12 BRACKET,CABLE 1 5010-402408-12 BRACKET 2 5010-405432-12 BRACKET(1),MOUNT 1 5010-307587-12 BRACKET(2),MOUNT 1 5018-000001-13 LM GUIDE SHS15V1UUC1FEM+545LF 3 023-003018-1 BELT,TIMING 1500-3GT-15 OPEN 3 023-003019-1 BELT,TIMING 297-3GT-9 3 026-006380-1 SPACER DXMK10-8-5-9 3 021-000739-1 PIN,PRL 4*10 SMALL M6 A-TYPE SUS303 23 044-000044-1 SUPPORT,PCB EM-3 2 044-001720-1 SUPPORT,PCB 3SQS-10 4 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 27 020-000009-1 CAP SCREW M3*10 SUS304 2 020-000824-1 CAP SCREW M3*10 SUS304 W/SPR & FLAT WASHER 8 020-001089-1 CAP SCREW M3*14 SUS304 8 020-000020-1 CAP SCREW M3*20 SUS304 22 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 19 020-001093-1 CAP SCREW M4*14 SUS304 45 020-001091-1 CAP SCREW M4*16 SUS304 22 020-000042-1 CAP SCREW M4*20 SUS304 4 020-000737-1 CAP SCREW M5*14 SUS304 15 020-000090-1 CAP SCREW M6*20 SUS304 2 020-001532-1 BAIND SCREW M3*8 SUS304 10 020-005645-1 CAP SCREW CBSST4-6 6 032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 28 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 4 032-000054-1 SPRING WASHER M3 SUS304 32 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 6 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 26 032-000058-1 SPRING WASHER M4 SUS304 44 032-000062-1 SPRING WASHER M5 SUS304 15 032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND 2 032-000066-1 SPRING WASHER M6 SUS304 2 033-000003-1 NUT M3 SUS304 8 Assembly Part No: 5085-410083-11 PULLEY(X) ASSY,IDLER 5002-400080-13 PULLEY(3) 2 5010-405954-12 HOLDER,PULLEY 2 5010-405873-12 SHAFT(2) 2 5004-400021-12 HOUSING (509510045711 1 5010-405955-11 SPACER(1),BEARING 2 5010-405956-12 SPACER(2),BEARING 2 022-100356-1 BEARING 608ZZ 4 020-005664-1 CAP SCREW CBSST5-10 4 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 020-000042-1 CAP SCREW M4*20 SUS304 1 032-000062-1 SPRING WASHER M5 SUS304 4 Assembly Part No: 5085-410757-11 MOTOR(X) ASSY 5002-400078-11 PULLEY(1) 1 5004-400022-11 BRACKET,MOTOR (509510045711 1 5040-000007-11 MOTOR,SERVO SGMAS-A5ABA-TE11 1 020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2 020-000034-1 CAP SCREW M4*12 SUS304 2 032-000058-1 SPRING WASHER M4 SUS304 4 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 5 020-000042-1 CAP SCREW M4*20 SUS304 2 020-000046-1 CAP SCREW M4*30 SUS304 1 033-000007-1 NUT M4 SUS304 1 Assembly Part No: 5085-407077-11 COVER(X) ASSY 5010-201863-11 COVER(1) 1 5010-201864-11 COVER(2) 1 5010-302543-11 COVER(3) 1 5010-307588-11 COVER(4) 1 5010-304490-11 COVER 1 5010-306600-11 COVER(6) 1 020-002601-1 BAIND SCREW M3*4 SUS304 31 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2 032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 2 032-000054-1 SPRING WASHER M3 SUS304 2 Assembly Part No: 5085-415480-11 PULLEY(X1) ASSY,DRIVE 5002-400079-12 PULLEY(2) 1 5002-400080-13 PULLEY(3) 2 5010-405954-12 HOLDER,PULLEY 3 5010-405872-13 SHAFT(1) 1 5010-405873-12 SHAFT(2) 1 5004-400021-12 HOUSING (509510045711 1 5010-405955-11 SPACER(1),BEARING 2 5010-405956-12 SPACER(2),BEARING 1 022-100356-1 BEARING 608ZZ 4 020-005664-1 CAP SCREW CBSST5-10 4 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2 032-000062-1 SPRING WASHER M5 SUS304 4 Assembly Part No: 5085-415481-11 PULLEY(X2,3) ASSY,DRIVE 5002-400079-12 PULLEY(2) 1 5002-400080-13 PULLEY(3) 2 5010-405954-12 HOLDER,PULLEY 3 5010-405872-13 SHAFT(1) 1 5010-405873-12 SHAFT(2) 1 5004-400021-12 HOUSING (509510045711 1 5010-405955-11 SPACER(1),BEARING 2 5010-405956-12 SPACER(2),BEARING 1 022-100356-1 BEARING 608ZZ 4 020-005664-1 CAP SCREW CBSST5-10 4 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 020-007185-1 SET SCREW M4*5 MF-ZNB DOUBLE POINT 2 032-000062-1 SPRING WASHER M5 SUS304 4 Assembly Part No: 5086-403957-15 X AXIS(E) ASSY,PRA 5041-000299-12 CABLE ASSY 1746249-1 (PRA X #01) 1 5041-000306-12 CABLE ASSY 1746250-1 (PRA X #06) 1 5086-404162-11 CABLE,PRA X #05 1 5086-402882-12 SENSOR,PHOTO PRA X #01 450 1 5086-402883-12 SENSOR,PHOTO PRA X #02 450 1 5086-402884-12 SENSOR,PHOTO PRA X #03 445 1 5086-402885-11 SENSOR,LIGHT PRA X #01 730 1 5086-402886-11 SENSOR,DETECT PRA X #01 200 1 5041-000405-11 CABLE ASSY PRA MTR-X1 #02 1 5041-000406-11 CABLE ASSY PRA MTR-X2 #02 1 5041-000407-11 CABLE ASSY PRA MTR-X3 #02 1 5086-404248-11 CABLE,PRA ENC-X1 #03 1 5086-404249-11 CABLE,PRA ENC-X2 #03 1 5086-404250-11 CABLE,PRA ENC-X3 #03 1 5044-000077-11 PCB,I/F TOB1045(BOARD,CONN PRA X #02) 1 Assembly Part No: 5085-405946-17 THETA AXIS ASSY 5004-400020-12 THETA,BASE (509510045811 1 5010-306499-12 BRACKET(FAN) 1 5004-400016-11 HOLDER,BELT (509510045411 4 5010-404896-11 BLOCK,FITTING 2 5010-405326-11 SHUTTER(Z) 1 5010-402272-12 STOPPER 1 5010-401565-12 PLATE 2 5010-403121-12 BRACKET 1 5010-403122-12 BRACKET,SUPPORT 1 5010-408760-11 COVER 1 5010-306401-11 PLATE(1),CLAMP 2 5010-405355-11 PLATE(2),CLAMP 2 5010-306402-11 PLATE(3),CLAMP 2 5010-405356-11 PLATE(4),CLAMP 4 5010-405357-12 PLATE(5),CLAMP 2 5010-403337-11 PLATE,NUT 4 5010-403339-11 BRACKET,CLAMP(2) 2 5010-403340-11 BRACKET,CLAMP(3) 2 5002-300008-11 CABLE(1) 2 5002-300009-11 CABLE(2) 2 017-001655-1 TUBE PN-4-4*2.5 IVORY 1 026-006368-1 SPACER NCLM6-8-17.5 4 028-004861-1 FITTING,TUBE ELB4-PT1/8-TR 4 028-016917-1 FITTING,TUBE EY4-PT1/8 2 028-010939-1 FITTING,TUBE GPA6 2 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 26 020-000007-1 CAP SCREW M3*8 SUS304 4 020-001186-1 CAP SCREW M3*35 SUS304 12 020-002945-1 CAP SCREW M4*6 SUS304 W/SPR&FLAT WASHER 16 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 20 020-001093-1 CAP SCREW M4*14 SUS304 26 020-000042-1 CAP SCREW M4*20 SUS304 6 020-000064-1 CAP SCREW M5*20 SUS304 16 020-001164-1 CAP SCREW M6*30 SUS304 4 032-000251-1 FLAT WASHER M3 SUS304 SMALL CIRCLE 4 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 12 032-000054-1 SPRING WASHER M3 SUS304 16 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 6 032-000058-1 SPRING WASHER M4 SUS304 32 032-000018-1 FLAT WASHER M5 SUS304 ROLISHED ROUND 16 032-000062-1 SPRING WASHER M5 SUS304 16 Assembly Part No: 5085-406978-11 COVER(TH) ASSY 5010-305828-12 COVER,FRONT 1 5010-305829-12 COVER,REAR 2 5010-305830-11 COVER,SIDE 2 5010-305831-11 COVER,UNDER 1 020-100825-1 BAIND SCREW M4*6 SUS304 30 Assembly Part No: 5085-407862-11 MOTOR(T) ASSY 5040-000009-11 MOTOR,SERVO SGMCS-08DDA-TE12 1 020-004197-1 CLUMPING SCREW FSU6-16 6 020-000080-1 CAP SCREW M6*10 SUS304 5 020-000090-1 CAP SCREW M6*20 SUS304 6 032-000187-1 FLAT WASHER M6 SUS304 POLISHED ROUND 6 032-000066-1 SPRING WASHER M6 SUS304 6 033-000016-1 NUT M6 SUS304 6 Assembly Part No: 5086-403958-12 THETA AXIS(E) ASSY,PRA 5041-000256-11 CABLE ASSY 1717344-6 (PRA T #11) 1 5041-000257-11 CABLE ASSY 1717344-1 (PRA T #12) 1 5041-000258-11 CABLE ASSY 1717344-3 (PRA T #13) 1 5041-000259-11 CABLE ASSY 1717344-2 (PRA T#14) 1 5041-000260-11 CABLE ASSY 1717344-5 (PRA T #15) 1 5041-000261-11 CABLE ASSY 1717344-4 (PRA T #16) 1 5041-000066-11 CABLE ASSY,FLAT WH FHV-SX(5W)76C A-A 1 5086-402872-11 SENSOR,PHOTO PRA T #01 400 1 5086-402873-11 FAN,DC PRA T #11 250 1 5086-402874-11 FAN,DC PRA T #12 250 1 5086-402875-11 FAN,DC PRA T #13 250 1 5086-402876-11 FAN,DC PRA T #14 250 1 5086-402877-11 FAN,DC PRA T #15 250 1 5086-402878-11 FAN,DC PRA T #16 250 1 5044-000017-11 PCB I/F TOB1037(CONN PRA THETA #01) 1 Assembly Part No: 5085-404901-11 FORK(300)ASSY 5010-201367-13 FORK,PRA 1 5004-300007-11 BLOCK(300),PRA (509510021211 3 020-005778-1 CAP SCREW CBSST4-8 3 020-002601-1 BAIND SCREW M3*4 SUS304 6 032-000585-1 FLAT WASHER M4 1L SUS304 3 Assembly Part No: 5085-410825-14 PLATE ASSY,HEAT SHIELD 5004-400024-11 PLATE,COVER (509510045611 1 5010-406949-11 SUPPORT(X-1) 1 020-000028-1 CAP SCREW M4*6 SUS304 2 020-007602-1 TORX CAP SCREW M4*8 SUS304 2 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 2 032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND 2 032-000058-1 SPRING WASHER M4 SUS304 2 This item is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = TBD; Requires Freight Shipping Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Items are sold with a 90-Day Satisfaction Guarantee Lister 0 RL Listed with ExportYourStore.com