S01100 - SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments

 NOTICE: This Document was balloted and approved for withdrawal in 2006.  These guidelines are intended as a minimum set of performance-based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2. 　Referenced SEMI Standards (purchase separately)SEMI S2 — Safety Guidelines for Semiconductor Manufacturing EquipmentSEMI S8 — Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment