MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions
$187.00
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1 Purpose1.1 This Specification provides the standard pitch dimensions for developers of microfluidic devices.2 Scope2.1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately)None. Revision HistorySEMI MS11-0318 (Reapproved 0525)SEMI MS11-0318 (first published)
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$187
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