Electrothermal E-chips - Fusion Select

Temperature Range: Room Temperature - 900°C, Electrode Material: Tungsten Fusion Electrothermal E-chips are Fusion Heating E-chips with four additional electrodes to support simultaneous heating and electrical characterization of samples. A thick layer of silicon nitride isolates the heating membrane from the electrodes. Samples are placed on the heating membrane, over a hole and spanning the electrodes, and electrical contacts can be formed via FIB metal deposition. Fusion Select systems can use the four center electrodes for a variety of electrical measurements including “4-point probe” characterization while heating. Older Fusion and Aduro systems can use the same chips, but only utilize the outer pairs of electrodes for measurements.  The Fusion Electrothermal E-chips are offered in two thermal calibration configurations: "vacuum only" for standard TEM experiments and "environmental" for experiments performed in an environmental TEM (E-TEM) or ex situ on the benchtop. The "vacuum o