2 SCCM Flow Controller

Specifications Control range: 0.0002 to 2 SCCM (0.01% to 100% of full scale) Flow measurement accuracy: ±(0.8% of reading + 0.2% of full scale) Flow measurement repeatability: ±(0.2% of reading + 0.02% of full scale) Operating pressure range: 11.5 to 160 PSIA Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA - whichever is greater Operating temperature range: -10 to +60°C Temperature reading accuracy: ±0.75°C Warm up time: <1 second Typical Control response time: As fast as 600 ms (T63) Normally closed valve (valve is closed when no power is applied) Pressure drop: 2 PSID Process connections: M5 - Female (10-32 compatible) Dimensions: 3.897"x3.338"x1.050" Specification Sheet Download Specification sheet Need more customization?  Request a quote online Contact us