
1 SLPM Flow Controller
Specifications Control range: 0.0001 to 1 SLPM (0.01% to 100% of full scale) Flow measurement accuracy: ±0.6% of reading or ±0.1% of full scale - whichever is greater Flow measurement repeatability: ±(0.1% of reading + 0.02% of full scale) Operating pressure range: 11.5 to 160 PSIA Pressure reading accuracy: ±0.5% of reading or ±0.07 PSIA - whichever is greater Operating temperature range: -10 to +60°C Temperature reading accuracy: ±0.75°C Warm up time: <1 second Typical Control response time: As fast as 40 ms (T63) Normally closed valve (valve is closed when no power is applied) Pressure drop: 1.5 PSID Process connections: 1/8" NPT - female Dimensions: 4.067"x3.588"x1.050" Specification Sheet Download Specification sheet Need more customization? Request a quote online Contact us