20 SLPM BASIS Thermal Mass Flow Controller

Specifications Control range: 0.02 to 20 SLPM (0.1% to 100% of full scale) Available gases: Air, Ar, CH4, H2, He, N2, N2O , O2 Flow measurement accuracy: ±1.5% of reading or ±0.2% of full scale - whichever is greater (gas dependent) Flow measurement repeatability: ±0.25% of reading or ±0.05% of full scale Operating pressure range: 0 to 60 PSIG Operating temperature range: 0 to 50°C STP 25°C and 1 atm Air preselected Warm up time: <1 minute (5 min optimal) Typical Control response time: As fast as 100 ms (T63) Normally closed valve (valve is closed when no power is applied) Pressure drop: 850 mbar (gas dependent) Dimensions: 1.83"x3.31"x1.0" (HxWxD) Cable not included. Evaluation cable available for purchase. Specification Sheet Download Specification sheet Customizations available in Quantities > 50 Contact us